Heidelberg Instruments VPG 800 Series For Advanced Semiconductor Production » read source
Heidelberg Instruments, a provider of design, development and production of laser lithography systems, announced an order for a VPG 800 Maskless Lithography System from Unimicron Corporation, Taiwan. With seven facilities in Taiwan and four production sites in China, Unimicron is a world leader in production of advanced semiconductor packaging and IC Carrier fabrication.
VPG 800 is the latest innovation from Heidelberg instruments, ideal for high volume production of today's demanding photomasks in advanced electronic packaging. Heidelberg Instruments is a provider of high precision maskless lithography systems.
These systems are used for direct writing and photomask production by some of the prestigious universities and industry producers in the areas of Advanced Electronic Packaging, MEMS, BioMEMS, Nano Technology, ASICS, Display and Micro Optics.
"As a leading supplier of maskless laser lithography systems for production of advanced semiconductor packaging photomasks, we are committed to provide superior, reliable and versatile solutions at the lowest cost of ownership," states Alexander Forozan, Vice President of Global Sales and Business Development. "We are pleased that Unimicron, a global leader in advanced electronic packaging, has chosen our VPG 800 for key production activities".
The new Volume Pattern Generator (VPG) line of large area lithography systems is a milestone in technological innovation and product development from Heidelberg Instruments, based on a patented vast exposure process parallelization. VPG is a reliable and economical solution, ideal for high volume production of today's demanding photomasks in electronic packaging, color filters and other applications requiring high resolution features on large areas with excellent image quality and registration.
The VPG can be configured with various stage dimensions designed to accommodate substrate sizes of 1600mm by 1400mm, 1100mm by 1100mm and 800mm by 800mm. These systems can be equipped with air-bearing stage, semi or fully automatic feeder for substrate loading and a UV laser source with an output of up to 20W. Smaller write grid ensures excellent edge roughness and stripe butting. The automatic calibration of stage positioning is achieved with great efficiency using the Stage Map Correction.